| [ KAIST ] in KIDS 글 쓴 이(By): lolol (-_-)_)_)_)) 날 짜 (Date): 2004년 11월 5일 금요일 오후 10시 01분 25초 제 목(Title): Re: [Q] 웨이퍼등 시료 깨끗하게 하는 방법 It's ok if it is used as a AFM substrate.. washing with EtOH (HPLC grade!! no maltong-_-) and then blow it with nitrogen or argon.. I always make AFM sample in that way.. do not use plasma.. it can change hydrophilicity of surface.. but it does not change morphology..so if u use afm to see height profile, then u can use plasma as a cleaner.. sorry for konglish.. i can;t type hangul.. |