| [ KJIST ] in KIDS 글 쓴 이(By): caught (꿈의극장) 날 짜 (Date): 1998년 11월 10일 화요일 오후 02시 29분 47초 제 목(Title): [Q]반도체 공정 분야 연구하시는 분께 질문 As u may know, the 'via' is the conducting channel between two metal layers. The tungsten (W) is generally used as the filling vias. Then, in some articles on metallization, the terminolgy of 'via poisoning' is frequently mentioned. What's it? If u know the via poisoning, let me know it please. Thank you very much. |